SEMI E94.1 : 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM)
Published date
12-01-2013
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Describes the services and data of SEMI E94 to SECS-II streams and functions and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E94 family of standards. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E53 : 2004 | EVENT REPORTING |
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