SEMI E95 : 2001(R2007)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Addresses the area of processing content with the direct intention of developing common software standards, so that problems involving operator training, operation specifications, and efficient development can be resolved more easily.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI S8 : 2018 | SAFETY GUIDELINE FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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