SEMI E97 : 2000A(R2007)
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK GLOBAL DECLARATIONS AND ABSTRACT INTERFACES
Published date
12-01-2013
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Defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to functionally integrate CIM Framework components.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. A = This document was published twice during the Feb 2000 (0200) publishing cycle. (05/2001) Also available in CD-ROM. (02/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E105 : 2001 | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK SCHEDULING COMPONENT |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
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