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SEMI E97 : 2000A(R2007)

SEMI E97 : 2000A(R2007)

Current

Current

The latest, up-to-date edition.

PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK GLOBAL DECLARATIONS AND ABSTRACT INTERFACES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to functionally integrate CIM Framework components.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. A = This document was published twice during the Feb 2000 (0200) publishing cycle. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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