SEMI F101 : 2005(R2011)E
Current
Current
The latest, up-to-date edition.
TEST METHODS FOR DETERMINING PRESSURE REGULATOR PERFORMANCE IN GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
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Describes a method for testing pressure regulators being considered for installation into gas systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2005) E = This standard was editorially modified in October 2017 to correct editorial errors. (10/2017)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F32 : 2011 | TEST METHOD FOR DETERMINING OF FLOW COEFFICIENT FOR HIGH PURITY SHUTOFF VALVES |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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