SEMI F105 : SEP 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
Superseded date
19-10-2022
Superseded by
Published date
12-01-2013
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Pertains to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F20 : 2006E(R2017) | SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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