SEMI F110 : 2012
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR MONO-DISPERSED POLYSTYRENE LATEX (PSL) CHALLENGE OF LIQUID FILTERS
Published date
12-01-2013
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Specifies a test method for the mono-dispersed polystyrene latex (PSL) challenging of liquid filters.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (08/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SupersededBy |
| SEMI C89 : 2016 | TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED BELOW 30 NM WITH INDUCTIVELY COUPLED PLASMA - MASS SPECTROSCOPY (ICP-MS) |
| SEMI C82 : 2013 | TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED 20 TO 50 NM WITH LIQUID-BORNE PARTICLE COUNTER |
| SEMI F63 : 2016 | GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSING |
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