SEMI F113 : 2016
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR PRESSURE TRANSDUCERS USED IN GAS DELIVERY SYSTEMS
Published date
02-01-2017
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Pertains to outline the test method for electronic pressure transducers used in gas delivery systems for semiconductor processing.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2016)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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