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SEMI F119:2021

Current

Current

The latest, up-to-date edition.

Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution

Available format(s)

Hardcopy

Language(s)

English

Published date

01-11-2021

€134.60
Excluding VAT

The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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