SEMI F14 : 1993(R1999)
Current
Current
The latest, up-to-date edition.
GUIDE FOR THE DESIGN OF GAS SOURCE EQUIPMENT ENCLOSURES
Published date
12-01-2013
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Defines gas source equipment enclosure design considerations. It is for use by purchasers and manufacturers. Modifications needed to facilitate specific gases, unusual applications or cylinders are not covered.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI S26 : 2016 | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR FPD MANUFACTURING SYSTEM |
| SEMI S4 : 2004 | SAFETY GUIDELINE FOR THE SEGREGATION/SEPARATION OF GAS CYLINDERS CONTAINED IN CABINETS |
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