SEMI F16 : 1994
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR 316L STAINLESS STEEL TUBING WHICH IS TO BE FINISHED AND ELECTROPOLISHED FOR HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
01-03-2004
12-01-2013
Identifies ASTM tubing specification requirements and defines the special material composition, ordering, wall thickness and quality assurance requirements for 316L stainless steel tubing to be crafted into electropolished tubing, fittings, component tube stubs made from tubing for use in high purity semiconductor manufacturing applications. It covers the special criteria for procuring nominal sizes of unfinished 316L stainless steel tubing used in high purity chemical liquid or gas distribution systems in semiconductor manufacturing facilities.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
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| SEMI F17 : 95(R2003) | SPECIFICATION FOR HIGH PURITY QUALITY ELECTROPOLISHED 316L STAINLESS STEEL TUBING, COMPONENT TUBE STUBS, AND FITTINGS MADE FROM TUBING |
| SEMI F28 : 2003(R2015) | TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS |
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