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SEMI F31 : 2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

GUIDE FOR BULK CHEMICAL DISTRIBUTION SYSTEMS

Superseded date

24-08-2024

Superseded by

SEMI F31:2024

Published date

12-01-2013

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Specifies components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI F39 : 2015 GUIDELINE FOR CHEMICAL BLENDING SYSTEMS

SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

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