SEMI F32 : 2011
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING OF FLOW COEFFICIENT FOR HIGH PURITY SHUTOFF VALVES
Published date
12-01-2013
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Specifies how to determine two criteria used in selecting valves of appropriate size for gases and liquids.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E49.5 : 2004 | GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI F101 : 2005(R2011)E | TEST METHODS FOR DETERMINING PRESSURE REGULATOR PERFORMANCE IN GAS DISTRIBUTION SYSTEMS |
| SEMI F4 : 2011 | SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER VALVES |
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