SEMI F4 : 2011
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER VALVES
Published date
12-01-2013
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Sets up the minimum design and performance requirements for pneumatically actuated cylinder valves used in semiconductor manufacturing. Also intended as an aid in the procurement of these valves.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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