SEMI F55 : 2000(R2012)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR DETERMINING THE CORROSION RESISTANCE OF MASS FLOW CONTROLLERS
Superseded date
07-01-2019
Superseded by
Published date
12-01-2013
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Describes a corrosive gas exposure test for mass flow controllers. Intended to accelerate the corrosion while simulating conditions that may be found within process equipment and gas systems in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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