SEMI F55 : 2000(R2012)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR DETERMINING THE CORROSION RESISTANCE OF MASS FLOW CONTROLLERS
07-01-2019
12-01-2013
Describes a corrosive gas exposure test for mass flow controllers. Intended to accelerate the corrosion while simulating conditions that may be found within process equipment and gas systems in the semiconductor industry.
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