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  • SEMI F6 : 1992

    Current The latest, up-to-date edition.

    GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS

    Available format(s): 

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Gives a guide for the fabrication, design and development of secondarily contained distribution piping for HPM (Hazardous production material). It covers the requirements in general for hazardous production material distribution piping for industries under the H-6 Classification of the Uniform Building Code as well as Articles 51/80 of the Uniform fire code etc. It does not cover individual exhausted enclosures ie gas cabinets and valve boxes.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI F68 : 2001(R2013) TEST METHOD FOR DETERMINING PURIFIER EFFICIENCY
    SEMI F67 : 2001(R2013) TEST METHOD FOR DETERMINING INERT GAS PURIFIER CAPACITY
    SEMI E104 : 2003 SPECIFICATION FOR INTEGRATION AND GUIDELINE FOR CALIBRATION OF LOW-PRESSURE PARTICLE MONITOR
    SEMI S18 : 2012 ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SILANE FLAMMABLE SILICON COMPOUNDS

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI F3 : 1994 GUIDE FOR WELDING STAINLESS STEEL TUBING FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI S4 : 2004 SAFETY GUIDELINE FOR THE SEGREGATION/SEPARATION OF GAS CYLINDERS CONTAINED IN CABINETS
    SEMI F1 : 2012 SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
    SEMI F2 : 1994 SPECIFICATION FOR 316L STAINLESS STEEL TUBING FOR GENERAL PURPOSE SEMICONDUCTOR MANUFACTURING APPLICATIONS
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