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SEMI F3 : 1994

SEMI F3 : 1994

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

GUIDE FOR WELDING STAINLESS STEEL TUBING FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

Withdrawn date

01-11-2003

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives available procedures for welding stainless steel gas distribution systems and provides information from which subsequent standardisation and evaluations can be derived. It covers the requirements in general for the welding of stainless steel gas distribution systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI F6 : 1992 GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS

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