SEMI F72 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE PAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
Superseded date
08-03-2021
Published date
12-01-2013
Specifies a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.
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