SEMI F72 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE PAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
Superseded date
08-03-2021
Superseded by
Published date
12-01-2013
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Specifies a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F60 : 2014 | TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS |
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