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SEMI F72 : 2014

SEMI F72 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TEST METHOD FOR AUGER ELECTRON SPECTROSCOPY (AES) EVALUATION OF OXIDE PAYER OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

Superseded date

08-03-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS

SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
SEMI F60 : 2014 TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS

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