SEMI F74 : 2003(R2010)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR THE PERFORMANCE AND EVALUATION OF METAL SEAL DESIGNS FOR USE IN GAS DELIVERY SYSTEMS
Published date
12-01-2013
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Helps in evaluating metal seal designs use in gas delivery systems. Also defines both surface-mounted gas systems and conventional metal face seal fitting systems. Also pertains to the connection seals used in conventional tubing type gas systems and between modules and components to the substrates used in surface-mounted gas systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI PV81 : 2018 | GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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