SEMI F77 : 2015
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR ELECTROCHEMICAL CRITICAL PITTING TEMPERATURE TESTING OF STAINLESS STEEL SURFACES USED IN CORROSIVE GAS SYSTEMS
Published date
12-01-2013
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Pertains to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2003)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
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