SEMI F97 : 2005
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR FACILITY PACKAGE INTEGRATION, MONITORING AND CONTROL
Published date
12-01-2013
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Describes the requirements for the architecture, functionality and interfaces for Facility Monitoring and Control Systems and the various Facility Package Units to enable a standardized and integrated communication between them.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
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