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SEMI F97 : 2005

SEMI F97 : 2005

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR FACILITY PACKAGE INTEGRATION, MONITORING AND CONTROL

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the requirements for the architecture, functionality and interfaces for Facility Monitoring and Control Systems and the various Facility Package Units to enable a standardized and integrated communication between them.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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