SEMI G6 : 1989
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR SEAL RING FLATNESS
Published date
12-01-2013
Sorry this product is not available in your region.
Specification covers the procedure for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. Procedure will not work on parts smaller than .330".
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI G5 : 1987 | STANDARD FOR CERAMIC CHIP CARRIERS |
| SEMI G61 : 1994 | SPECIFICATION FOR COFIRED CERAMIC PACKAGES |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.