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SEMI
SEMI G6 : 1989

SEMI G6 : 1989

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR SEAL RING FLATNESS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specification covers the procedure for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. Procedure will not work on parts smaller than .330".

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI G5 : 1987 STANDARD FOR CERAMIC CHIP CARRIERS
SEMI G61 : 1994 SPECIFICATION FOR COFIRED CERAMIC PACKAGES

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