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SEMI G61 : 1994

SEMI G61 : 1994

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR COFIRED CERAMIC PACKAGES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the materials and acceptance criteria for high-temperature, cofired ceramic packages.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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