• Shopping Cart
    There are no items in your cart

SEMI G66:1996(R2023)

Current

Current

The latest, up-to-date edition.

Test Method for the Measurement of Water Absorption Characteristics for Semiconductor Plastic Molding Compounds

Available format(s)

Hardcopy

Language(s)

English

Published date

01-08-2023

€152.54
Excluding VAT

This Test Method describes a procedure for measuring the water absorption rate for plastic molding compounds and provides a method to calculate the diffusion and solubility coefficients, which are required to simulate the water absorption characteristics.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E5:2023 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E40 : 2018 Specification for Processing Management

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.