SEMI G82 : 2015(R2020)
Current
Current
The latest, up-to-date edition.
Specification for 300 mm Load Port for Frame Cassettes in Backend Process
Available format(s)
Hardcopy
Language(s)
English
Published date
01-12-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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