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SEMI G92 : 2015

SEMI G92 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER

Superseded date

08-02-2021

Published date

11-08-2014

Publisher

Semiconductor Equipment & Materials Institute

Pertains to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die-bonding process.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (08/2014)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E156 : 2015 SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT
SEMI G95 : 2014 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS

SEMI G88 : 2011(R2017) SPECIFICATION FOR TAPE FRAME FOR 450 MM WAFER
SEMI G95 : 2014 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS

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