SEMI G92 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER
Superseded date
08-02-2021
Superseded by
Published date
11-08-2014
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Pertains to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die-bonding process.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (08/2014)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E156 : 2015 | SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT |
| SEMI G95 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS |
| SEMI G88 : 2011(R2017) | SPECIFICATION FOR TAPE FRAME FOR 450 MM WAFER |
| SEMI G95 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS |
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