SEMI G94:2013(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
€141.67
Excluding VAT
This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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