SEMI G94:2013(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
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