SEMI G94:2013(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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