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SEMI G95 : 2014

SEMI G95 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS

Superseded date

08-02-2021

Published date

28-07-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the mechanical interface of a load port in semiconductor manufacturing equipment, where the 450 mm tape frame cassette (450 TFC) can be loaded and unloaded.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI G92 : 2015 SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER
SEMI E83 : 2015 SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE

SEMI G88 : 2011(R2017) SPECIFICATION FOR TAPE FRAME FOR 450 MM WAFER
SEMI G92 : 2015 SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER

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