SEMI G95 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS
Superseded date
08-02-2021
Superseded by
Published date
28-07-2013
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Specifies the mechanical interface of a load port in semiconductor manufacturing equipment, where the 450 mm tape frame cassette (450 TFC) can be loaded and unloaded.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI G92 : 2015 | SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER |
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI G88 : 2011(R2017) | SPECIFICATION FOR TAPE FRAME FOR 450 MM WAFER |
| SEMI G92 : 2015 | SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER |
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