SEMI G95 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Mechanical Features of 450 mm Load Port for Tape Frame Cassettes in the Backend Process
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2020
€125.00
Excluding VAT
This Standard is to define the mechanical interface of a load port in semiconductor manufacturing equipment, where the 450 mm tape frame cassette (450 TFC) can be loaded and unloaded.
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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