![header thumbnail](/images/publishers\semi_cover.gif)
SEMI G95 : 2020
Current
Current
The latest, up-to-date edition.
![header thumbnail](/images/publishers\semi_cover.gif)
Specification for Mechanical Features of 450 mm Load Port for Tape Frame Cassettes in the Backend Process
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2020
This Standard is to define the mechanical interface of a load port in semiconductor manufacturing equipment, where the 450 mm tape frame cassette (450 TFC) can be loaded and unloaded.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.