SEMI HB3 : 2016
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The latest, up-to-date edition.
SPECIFICATION FOR THE MECHANICAL INTERFACE FOR 150 MM HB-LED LOAD PORT
Published date
05-12-2013
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Pertains to define the basic interface dimensions of a load port and their arrangements on HB-LED manufacturing equipment, where HB-LED 150 mm cassettes can be loaded and unloaded.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E144 : 2012 | SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT |
| SEMI E63 : 2016 | SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE |
| SEMI HB2 : 2013(R2018) | SPECIFICATION FOR 150 MM OPEN PLASTIC AND METAL WAFER CASSETTES INTENDED FOR USE FOR MANUFACTURING HB-LED DEVICES |
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