Customer Support: +353 (0)1 857 6730

Corporate Website About Us
  • There are no items in your cart
Please enter a keyword to search
Advanced search
Home
SEMI
SEMI HB3 : 2016

SEMI HB3 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR THE MECHANICAL INTERFACE FOR 150 MM HB-LED LOAD PORT

Published date

05-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to define the basic interface dimensions of a load port and their arrangements on HB-LED manufacturing equipment, where HB-LED 150 mm cassettes can be loaded and unloaded.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E144 : 2012 SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
SEMI HB2 : 2013(R2018) SPECIFICATION FOR 150 MM OPEN PLASTIC AND METAL WAFER CASSETTES INTENDED FOR USE FOR MANUFACTURING HB-LED DEVICES

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Get in touch with us