SEMI HB8 : 2017
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING ORIENTATION OF A SAPPHIRE SINGLE CRYSTAL
Published date
10-05-2017
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Describes a test method for sapphire single crystal orientation measurement which includes sapphire cylinder, sapphire ingot, sapphire wafer, etc.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2017)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI MF847 : 2016 | TEST METHOD FOR MEASURING CRYSTALLOGRAPHIC ORIENTATION OF FLATS ON SINGLE CRYSTAL SILICON WAFERS BY X-RAY TECHNIQUES |
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