SEMI M12 : 2006(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR SERIAL ALPHANUMERIC MARKING OF THE FRONT SURFACE OF WAFERS
Published date
12-01-2013
Superseded date
13-06-2023
Superseded by
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Provides a serial alphanumeric marking of silicon or other semiconductor wafers. Also defines the geometric and spatial limits of the alphanumeric code, specifically for serial identification of flatted and notched silicon wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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