SEMI M12:2023
Current
Current
The latest, up-to-date edition.
Specification for Serial Alphanumeric Marking of Silicon Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-05-2023
€141.67
Excluding VAT
This Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI M13:2023 | Specification for Alphanumeric Marking of Silicon Wafers |
| SEMI M1 : 2018 | Specification for Polished Single Crystal Silicon Wafers |
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