SEMI M13 : 2006(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR ALPHANUMERIC MARKING OF SILICON WAFERS
12-06-2023
12-01-2013
Describes an alphanumeric marking system for silicon wafers. Also describes the character set, location, and associated dimensions and tolerances of an alphanumeric code, specifically for identification of flatted and notched silicon wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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