Name: SEMI M23:2023
Brand: SEMI
Price: 158.61 EUR

Specification for Polished Monocrystalline Indium Phosphide Wafers

Available format(s)

Hardcopy

Language(s)

English

Published date

01-06-2023

Publisher

Semiconductor Equipment & Materials Institute

This Specification covers the substrate requirements for monocrystalline high-purity indium phosphide wafers used in semiconductor and electronic device manufacturing.

DocumentType	Standard
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI M23 : 2003(R2018)

SEMI MF84:2012	TEST METHOD FOR MEASURING RESISTIVITY OF SILICON WAFERS WITH AN IN-LINE FOUR-POINT PROBE
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SEMI MF1390 : 2018	TEST METHOD FOR MEASURING BOW AND WARP ON SILICON WAFERS BY AUTOMATED NONCONTACT SCANNING
SEMI MF671:2012	TEST METHOD FOR MEASURING FLAT LENGTH ON WAFERS OF SILICON AND OTHER ELECTRONIC MATERIALS

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SEMI M23:2023

Specification for Polished Monocrystalline Indium Phosphide Wafers

Abstract

General Product Information

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