SEMI M27 : 1996
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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PRACTICE FOR DETERMINING THE PRECISION OVER TOLERANCE (P/T) RATIO OF TEXT EQUIPMENT
01-11-2004
12-01-2013
Covers a method for estimating the capability of a test instrument with respect to the tolerance (specification) of a parameter. Provides a standardized procedure for determination of the relationship between the measurement precision of a single instrument and the specific range. Procedure is for estimating the overall measurement precision of the measurement process as carried out by an automated (self-calibrating) or non-automated (non-self calibrating) test instrument under the conditions normally encountered in applying the instrument. No information is developed concerning the components of the precision; consequently, this practice may not be used to determine the origins of measurement variability. Both single-sided and double- sided specifications are covered by this practice.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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