SEMI M30 : 1997

Purpose is to test substitutional atomic carbon concentration in GaAs by Fourier Transform Infrared Absorption Spectroscopy (FT-IR). Referee test procedure covers the determination of substitutional carbon concentration in single crystal GaAs . The helpful range of carbon concentration measurable at room temperature by this test procedure is from the maximum amount of substitutional carbon soluable in GaAs. Standard may involve hazardous equipment, materials and operation. Standard does not purport to address all safety problems associated with its use. The user of this standard has the responsibility to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.