SEMI M43 : 2018
Current
Current
The latest, up-to-date edition.
GUIDE FOR REPORTING WAFER NANOTOPOGRAPHY
Published date
12-01-2013
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Specifies a framework for reporting of nanotopography surface features on silicon wafers. It also specifies reporting the characterization of nanotopography surface features found on wafer surfaces.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
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