SEMI M46 : 2001E(R2015)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR MEASURING CARRIER CONCENTRATIONS IN EPITAXIAL LAYER STRUCTURES BY ECV PROFILING
Published date
12-01-2013
Sorry this product is not available in your region.
States a method to measure the carrier concentration and carrier concentration vs. depth profile of epitaxial layers by Electrochemical Capacitance Voltage ECV profiling and test method covers a procedure for measuring the carrier concentration of epitaxial layers by ECV profiling.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001) E = Editorially modified to correct a typographical error. (03/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.