SEMI M52:2021
Current
Current
The latest, up-to-date edition.
Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2021
€250.00
Excluding VAT
This Guide provides recommendations for specifying scanning surface inspection systems (SSIS) for the 130, 90, 65, 45, 32, 22, 16, 11, 7, and 5 nm technology generations.
| DocumentType |
Revision
|
| Pages |
0
|
| ProductNote |
This standard also refers to - SEMI E1.9
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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