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SEMI M54 : 2004(R2011)

SEMI M54 : 2004(R2011)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

GUIDE FOR SEMI-INSULATING (SI) GAAS MATERIAL PARAMETERS

Superseded date

06-04-2019

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a basis for specifying the material parameters of SI GaAs to support ordering agreements between suppliers and purchasers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI M82 : 2013 TEST METHOD FOR THE CARBON ACCEPTOR CONCENTRATION IN SEMI-INSULATING GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY
SEMI M87 : 2016 TEST METHOD FOR CONTACTLESS RESISTIVITY MEASUREMENT OF SEMI-INSULATING SEMICONDUCTORS

SEMI M36 : 1999 TEST METHOD FOR MEASURING ETCH PIT DENSITY (EPD) IN LOW DISLOCATION DENSITY GALLIUM ARSENIDE WAFERS
SEMI M30 : 1997 STANDARD TEST METHOD FOR SUBSTITUTIONAL ATOMIC CARBON CONCENTRATION IN GAAS BY FOURIER TRANSFORM INFRARED ABSORPTION SPECTROSCOPY
SEMI M15 : 1998 POLISHED WAFER DEFECT LIMITS TABLE FOR SEMI-INSULATING GALLIUM ARSENIDE WAFERS
SEMI M39 : 1999 TEST METHOD FOR MEASURING RESISTIVITY AND HALL COEFFICIENT AND DETERMINING HALL MOBILITY ON SEMI-INSULATING GAAS SINGLE CRYSTALS
SEMI M9 : 2016 SPECIFICATION FOR POLISHED MONOCRYSTALLINE GALLIUM ARSENIDE WAFERS

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