SEMI M55.2 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR 76.2 MM ROUND POLISHED MONOCRYSTALLINE 4H AND 6H SILICON CARBIDE WAFERS
Superseded date
01-08-2014
Published date
12-01-2013
Details the dimensional values and other information required for 76.2 mm polished monocrystalline silicon carbide wafers.
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