SEMI M55.2 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR 76.2 MM ROUND POLISHED MONOCRYSTALLINE 4H AND 6H SILICON CARBIDE WAFERS
Superseded date
01-08-2014
Superseded by
Published date
12-01-2013
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Details the dimensional values and other information required for 76.2 mm polished monocrystalline silicon carbide wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
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