SEMI M55.2 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR 76.2 MM ROUND POLISHED MONOCRYSTALLINE 4H AND 6H SILICON CARBIDE WAFERS
Superseded date
01-08-2014
Published date
12-01-2013
Details the dimensional values and other information required for 76.2 mm polished monocrystalline silicon carbide wafers.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.