SEMI M56 : 2007
Current
Current
The latest, up-to-date edition.
PRACTICE FOR DETERMINING COST COMPONENTS FOR METROLOGY EQUIPMENT DUE TO MEASUREMENT VARIABILITY AND BIAS
Published date
12-01-2013
Provides a standard methodology for metrology equipment suppliers and users to determine the cost due to misclassification of product because of measurement variability and bias during testing of the product for conformance to a specification.
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