SEMI M56 : 2007
Current
Current
The latest, up-to-date edition.
PRACTICE FOR DETERMINING COST COMPONENTS FOR METROLOGY EQUIPMENT DUE TO MEASUREMENT VARIABILITY AND BIAS
Published date
12-01-2013
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Provides a standard methodology for metrology equipment suppliers and users to determine the cost due to misclassification of product because of measurement variability and bias during testing of the product for conformance to a specification.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2003) Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI E89 : 2007(R2013) | GUIDE FOR MEASUREMENT SYSTEM ANALYSIS (MSA) |
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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