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SEMI M64 : 2015

SEMI M64 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR THE EL2 DEEP DONOR CONCENTRATION IN SEMI-INSULATING (SI) GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY

Superseded date

12-05-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines a method to measure the concentration of the deep donor EL2 in SI GaAs by infrared absorption.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI M82 : 2013 TEST METHOD FOR THE CARBON ACCEPTOR CONCENTRATION IN SEMI-INSULATING GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY

SEMI M39 : 1999 TEST METHOD FOR MEASURING RESISTIVITY AND HALL COEFFICIENT AND DETERMINING HALL MOBILITY ON SEMI-INSULATING GAAS SINGLE CRYSTALS

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