SEMI M64:2015(R2022)
Current
Current
The latest, up-to-date edition.
Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2022
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Test Method is to specify a method to measure the concentration of the deep donor EL2 in SI GaAs by infrared absorption
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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